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    User name Vardan

    Log entry time 14:14:27 on August 7,2001

    Entry number 37579

    keyword=wiered SEM

    After beam back at 13:30 we got the strange picture on the SEM graph. Along with the usual octagon there is a small one, shifted to the left relative to the big oktagon. SEM parameters read:

    C_x = +1.2 mm
    d_x = 20.0 mm
    C_y = +0.0 mm
    d_y = 29.5 mm
    TH_x = 1.46 V
    TH_y = 1.45 V .